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Ion Implantation Parts

We always adhere to the quality basis of self-produced refractory metal materials such as tungsten, molybdenum, tantalum and niobium, and have a complete set of high-precision material machining equipment such as EDM machines, grinding machines, milling machines and machining centers, and high-precision detection instruments such as video measuring instrument, height measuring device, roughness measuring instrument and three coordinate measuring machine.

Product Description

產(chǎn)品用途：

用來生產(chǎn)半導體離子注入零件。

Application:

They are used to produce parts of the semiconductor ion implanter.

產(chǎn)品性能參數(shù)/Product Property Parameters：

產(chǎn)品名稱Name

TZM

密度Density

(g/cm³)

19.1

10.15

10.05

產(chǎn)品加工精度參數(shù)/Product Processing Accuracy Parameters：

主要材質 Main Materials	加工范圍 Processing Range	尺寸精度Dimensional Accuracy (mm)	形狀精度Shape Accuracy (mm)	位置精度Position Accuracy (mm)	光潔度Finish (Ra, μm)
W、M、TZM	0.00-5.00	±0.003	0.01	0.005	0.2-0.4
W、M、TZM	5.01-15.00	±0.005	0.015	0.006	0.4
W、M、TZM	15.01-30	±0.008	0.02	0.007	0.4
W、M、TZM	30.01-100	±0.010	0.025	0.008	0.6
W、M、TZM	> 100	±0.0127	0.030	0.010	0.6

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Ion Implantation Parts

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